CMP Elite Z SyntheticSDS
| CMP Elite A Synthetic | CMP Elite Z Synthetic | |
|---|---|---|
| Vapor Pressure @ 25 °C | 1X10-7 Torr | 1X10-7 Torr |
| Viscosity @ 40 °C | 48 cst | 55 cst |
| Pour Point | -54 °C | -34 °C |
| Specific Gravity @ 22 °C | 0.83 g/ml | 0.84 g/ml |
| Flash Point - C.O.C. | 249 °C 480 °F | 268 °C 515 °F |
| Fire Point - C.O.C. | 279 °C 535 °F | 305 °C 581 °F |
CMP ELITE A and Z are two different viscosity versions of full synthetic hydrocarbon fluids which are double-distilled through a molecular distillation process. They have very low pour points to eliminate cold start problems and a very high viscosity index providing exceptional resistance to higher temperatures seen in many high rpm rotary vane pumps.
Their molecular structures are unique and provide excellent chemical inertness and high temperature stability. CMP ELITE mechanical pump fluids have a much higher molecular weight than petroleum oils and exhibit greatly reduced backstreaming tendencies.
CMP ELITE synthetic fluids are miscible with hydrocarbon oils and do not require any special cleaning procedures before use.
CMP ELITE Z Synthetic is the most popular choice of these two versions and can be used in all types of rotary vane pumps.
Typical applications include: Instrumentation, LPCVP, nitride deposition, ion implantation, plasma etching, sputtering and biomedical processes.
CAUTION: These products are not non-flammable and should not be used in applications where there is risk of explosion from high oxygen enriched environments.